| 摘要 |
According to one embodiment, a microwave annealing device is provided. The microwave annealing device comprises a housing (10) shielding electromagnetic waves; a first electromagnetic wave source (21) configured to supply a first electromagnetic wave into the housing (10); a second electromagnetic wave source (22) configured to apply, into the housing (10), a second electromagnetic wave having a higher frequency than the first electromagnetic wave; a susceptor (12) configured to hold a semiconductor substrate (11), made of a material transparent to the first electromagnetic wave, and formed in the housing (10); a temperature measuring device (13) configured to measure the temperature of the semiconductor substrate (11); and a control unit (31) configured to control each power of the first and second electromagnetic wave sources (21, 22) in accordance with the temperature measured by the temperature measuring device (13). [Reference numerals] (31) Control part; (32) Processing part |
