DEVICE AND METHOD FOR CONTACTLESS ELECTRICAL INSPECTION

摘要

The present invention relates to a contactless electrical test device. The device includes: an electron supply unit which generates charged electrons on one surface of an examination target object in a vacuum space; an electron movement guide unit which is separated from the other surface of the examination target object and guides contactless movement of the charged electrons on the formerly-mentioned surface of the examination target object; a high voltage application unit which applies high voltage to the vacuum space and the electron movement guide unit for forming an electric field in order to move the electrons generated by the electron supply unit, make the electrons to be charged onto the formerly-mentioned surface of the examination target object, and move the electrons charged onto the formerly-mentioned surface of the examination target object through the latterly-mentioned surface of the examination target object to the electron movement guide unit; a current/voltage measurement unit which measures currents and voltages due to the flow of the electrons which are induced to move by the electron movement guide unit; and a control unit which determines whether to disconnect or short-circuit a plurality of patterns formed on the examination target object according to the electrical variation of the current and the voltage measured by the current/voltage measurement unit. By testing whether the examination target object is disconnected or short-circuited without contact, the present invention is able to prevent damage due to direct contact onto the examination target object and reduce the manufacturing costs of a probe and a jig, which are usually expensive. [Reference numerals] (113) Power unit; (130) Current/voltage measurement unit; (140) High voltage application unit; (150) Position adjustment unit; (160) Control unit