| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical filter device suppressed in the deterioration of performance. SOLUTION: The optical filter device includes: an etalon element having a pair of mirrors facing each other with a gap therebetween; a driving device capable of moving the mirrors in accordance with a driving signal in order to adjust the gap; a supply device for supplying a driving signal to the driving device; a wavelength selecting element separate from the etalon element which is disposed on at least a part of an optical path of light transmitted through the etalon element and transmits light having a specific wavelength; a light receiving device disposed in such a position as to be able to receive light transmitted through the etalon element and the wavelength selecting element; and a correction device for correcting the driving signal on the basis of an output signal of the light receiving device. COPYRIGHT: (C)2010,JPO&INPIT |
