发明名称 |
CONTACTLESS CAPACITIVE DISTANCE SENSOR |
摘要 |
Electrically conductive structures produced on or in a substrate, or produced such that the structures are floating in a substrate undergo simple and reliable capacitive contactless and non-destructive inspection using a capacitive sensor having at least two sensor electrode surfaces which are arranged at different constant distances from one another parallel to a surface of the substrate and are arranged beside one another relative to the surface of the substrate. |
申请公布号 |
EP2707734(A1) |
申请公布日期 |
2014.03.19 |
申请号 |
EP20120751020 |
申请日期 |
2012.08.02 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
ALATAS, FATIH;KOERDEL, MARTIN;SCHICK, ANTON |
分类号 |
G01R31/312;G01B7/06 |
主分类号 |
G01R31/312 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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