BISTABLE FORCE AND/OR ACCELERATION SENSOR

摘要

A technique is provided for determining a force/acceleration acting on a proof mass of a bistable device. According to an aspect of the invention, the location of a boundary of one of the stable configurations of the device is monitored. The monitored location is compared to a predetermined location of the same boundary, said predetermined location corresponding to a condition in which the force/acceleration is absent, to detect a deviation of said location. The deviation is indicative of the force/acceleration and can be used to determine the force/acceleration. According to another aspect of the invention, the resonance frequency of the proof mass' oscillation in one of the stable regions is monitored, and compared to a predetermined resonance frequency the proof mass' oscillation in the same region corresponding to a condition in which the force/acceleration is absent, to determine a deviation of the resonance frequency due to the presence of force/acceleration. The deviation in the resonance frequency can be used to determine the force/acceleration.