| 摘要 |
PROBLEM TO BE SOLVED: To acquire a height of an inspection object with a small frequency of imaging. SOLUTION: A visual inspection device 10 projects a first stripe pattern whose brightness periodically changes onto an inspection object in multiple different phases and images multiple first projection images. The visual inspection device 10 projects a second stripe pattern whose brightness changes at a cycle different from the first stripe pattern onto the inspection object in multiple different phases and images multiple second projection images. The visual inspection device 10 calculates a phase of brightness variation corresponding to the second stripe pattern at a measurement point in the inspection object based on brightness at the measurement point in the first projection images and the second projection images, and known relation between the brightness variations corresponding to the respective first and second stripe patterns. COPYRIGHT: (C)2012,JPO&INPIT |
