| 摘要 |
<p>The system (1) has actuators (9, 10) engaged to a mass (2) e.g. table, to be isolated, and a horizontal sensor detecting movement of a base, on which the system is arranged. A vertical sensor (5) detects seismic vibrations and corresponding movement of the base in all three spatial directions. A controller (7) has a converting unit converting signals of the sensors representing the movement of the base such that the controller determines position change of the mass in a degree of freedom to calculate compensation signals in another degree of freedom from the signals of the sensors. An independent claim is also included for a method for controlling an active vibration isolating system.</p> |
