发明名称 Optical module, electronic device, and driving method
摘要 An optical module includes a wavelength variable interference filter having a fixed reflective film, a movable reflective film which faces the fixed reflective film with a gap between reflective films interposed therebetween, and an electrostatic actuator that changes the gap between reflective films, and a gap control unit that controls the electrostatic actuator. The gap control unit controls the electrostatic actuator on the basis of an order which is set in accordance with a wavelength to be measured, and changes the gap between the reflective films.
申请公布号 EP2708861(A1) 申请公布日期 2014.03.19
申请号 EP20130183692 申请日期 2013.09.10
申请人 SEIKO EPSON CORPORATION 发明人 MATSUSHITA, TOMONORI;HIROKUBO, NOZOMU
分类号 G01J3/26;G02B26/00 主分类号 G01J3/26
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