METHOD AND APPARATUS FOR FORMING A GRAPHENE PATTERN USING A DELAMINATION TECHNIQUE
摘要
The present invention relates to a graphene pattem forming method using a delamination technique employing ap01lymer stamp. The technique is adequate for forming a graphene pattem having a an arbitrary target pattem. According to the present invention, a portion of a graphene layer formed on a substrate is physically and selectively delaminated using the polymer stamp to simply and easily form a desired graphene pattem having a uniform line width on the substrate. Also, a porion of the graphene layer formed on the substrate is physically and selectively delaminated in a roll-to-roll manner using a rotating body stamp or by using a stamp having a large area to simply and easily form a desired graphene pattem having a uniform line width on the a substrate having a large area.
申请公布号
EP2709141(A2)
申请公布日期
2014.03.19
申请号
EP20120786200
申请日期
2012.05.10
申请人
KOREA RESEARCH INSTITUTE OF CHEMICAL TECHNOLOGY
发明人
LEE, SUN SOOK;JUNG, DAESUNG;KIM, HAN SUN;AN, KI-SEOK;CHUNG, TAEK-MO;KIM, CHANG GYOUN;LEE, YOUNG KUK