发明名称 |
HEAT TREATMENT BY INJECTION OF A HEAT-TRANSFER GAS |
摘要 |
A heat treatment of a precursor that reacts with temperature, and that comprises in particular the steps of: preheating or cooling a heat-transfer gas to a controlled temperature, and injecting the preheated or cooled gas over the precursor. Advantageously, besides the temperature of the heat-transfer gas, the following are also controlled: the flow rate of the gas at the injection over the precursor, and also a distance between the precursor and an outlet for injection of the gas over the precursor, in order to finely control the temperature of the precursor receiving the injected gas. |
申请公布号 |
EP2707896(A1) |
申请公布日期 |
2014.03.19 |
申请号 |
EP20120725101 |
申请日期 |
2012.05.03 |
申请人 |
ELECTRICITE DE FRANCE;CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) |
发明人 |
SAVIDAND, GREGORY;LINCOT, DANIEL |
分类号 |
H01L21/67;H01L21/428;H01L31/032 |
主分类号 |
H01L21/67 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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