发明名称 HEAT TREATMENT BY INJECTION OF A HEAT-TRANSFER GAS
摘要 A heat treatment of a precursor that reacts with temperature, and that comprises in particular the steps of: preheating or cooling a heat-transfer gas to a controlled temperature, and injecting the preheated or cooled gas over the precursor. Advantageously, besides the temperature of the heat-transfer gas, the following are also controlled: the flow rate of the gas at the injection over the precursor, and also a distance between the precursor and an outlet for injection of the gas over the precursor, in order to finely control the temperature of the precursor receiving the injected gas.
申请公布号 EP2707896(A1) 申请公布日期 2014.03.19
申请号 EP20120725101 申请日期 2012.05.03
申请人 ELECTRICITE DE FRANCE;CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) 发明人 SAVIDAND, GREGORY;LINCOT, DANIEL
分类号 H01L21/67;H01L21/428;H01L31/032 主分类号 H01L21/67
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