| 发明名称 |
METHOD FOR DIFFUSING METAL PARTICLES WITHIN A COMPOSITE LAYER |
| 摘要 |
A method for diffusing metal particles including a composite layer deposited on a substrate, with the composite layer further including at least one dielectric matrix, and where the diffusion of the metal particles towards the substrate is achieved by means of a plasma treatment. |
| 申请公布号 |
EP2576866(B1) |
申请公布日期 |
2014.03.19 |
| 申请号 |
EP20110727240 |
申请日期 |
2011.05.19 |
| 申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES;CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE |
发明人 |
BEDEL, LAURENT;CAYRON, CYRIL;JOUVE, MICHEL;MAURY, FRANCIS;QUESNEL, ETIENNE |
| 分类号 |
C23C30/00;C23C14/18;C23C14/58;C23C16/40;C23C16/56;C23C28/00 |
主分类号 |
C23C30/00 |
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