YTTRIA-ZIRCONIA COMPLEX OXIDE HAVING CORROSION RESISTANCE OF PLASMA

摘要

Disclosed is an yttria-zirconia complex oxide having corrosion resistance to plasma, which does not generate breakage by having high corrosion resistance properties to plasma and high mechanical strength. Contents of an yttria powder and zirconia in the complex oxide are 95-45 wt%:5-55 wt%, and the yttria and zirconia form a solid solution by being sintered. [Reference numerals] (AA) Relative etching speed; (BB) Alumina; (CC) Yttria; (DD) Present invention