发明名称 SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
摘要 The present invention relates to a semiconductor device and a method of fabricating the same. More particularly, the present invention provides a semiconductor device capable of improving signal transmission speed. According to the embodiment of the present invention, the semiconductor device includes an air gap region by conductive patterns and a capping layer which covering the upper surface of them. According to the embodiment of the present invention, the method of fabricating a semiconductor device automatically forms a support pattern in a region of a wide gap among the gaps between the conductive patterns.
申请公布号 KR20140033579(A) 申请公布日期 2014.03.19
申请号 KR20120098464 申请日期 2012.09.05
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 HAN, KYU HEE;AHN SANGHOON
分类号 H01L21/28;H01L21/768 主分类号 H01L21/28
代理机构 代理人
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