发明名称 |
SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME |
摘要 |
The present invention relates to a semiconductor device and a method of fabricating the same. More particularly, the present invention provides a semiconductor device capable of improving signal transmission speed. According to the embodiment of the present invention, the semiconductor device includes an air gap region by conductive patterns and a capping layer which covering the upper surface of them. According to the embodiment of the present invention, the method of fabricating a semiconductor device automatically forms a support pattern in a region of a wide gap among the gaps between the conductive patterns. |
申请公布号 |
KR20140033579(A) |
申请公布日期 |
2014.03.19 |
申请号 |
KR20120098464 |
申请日期 |
2012.09.05 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
HAN, KYU HEE;AHN SANGHOON |
分类号 |
H01L21/28;H01L21/768 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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