| 摘要 |
A resonant sensor is disclosed which may be arranged to measure the pressure of a fluid. The resonant sensor comprises a diaphragm which may be exposed to a fluid; two supports provided on the diaphragm and a resonator having at least two beams with each beam being suspended between the two supports. The ends of each beam are attached to a corresponding support at more than one point. By attaching each end of the beams to a support at more than one point, the moments and reaction forces to which the support is subjected may be balanced so that distortion of the support and diaphragm due to vibration of the resonator beams is reduced. Consequently, the resonant sensor is able to provide more precise measurements. |
