| 摘要 |
<p>There are provided a first (Y-axial direction) moving unit, a movement auxiliary unit for moving in substantially parallel with the first moving unit, and a second (X-axial direction) moving unit for moving substantially perpendicular to the first moving unit. Force generated for moving the second moving unit is received by the movement auxiliary unit to perform driving of the XY directions. Thus, when a measuring probe provided on the second moving unit is scanned in the XY directions, vibrations of the first moving unit can be suppressed without the first moving unit receiving a counteraction of force that acts in a direction substantially perpendicular to the moving direction of the first moving unit.</p> |
