| 摘要 |
The present invention relates to a plasma cleaning apparatus capable of representing superior heat transfer effect while ensuring an inner space of the plasma cleaning apparatus by the configuration of a heater integrally accommodated in an electrode plate. According to the present invention, the plasma cleaning apparatus includes a body (10) formed therein with a chamber (12) so that the chamber (12) is filled with gas supplied from a gas supply unit connected to one side of the body (10); and a plurality of electrode plates (20) conducted by a current supply unit connected to the other side of the body (10) so that the gas filled in the chamber (12) forms plasma, horizontally or vertically spaced apart from each other in the chamber (12) so that a cleaned object (C) is positioned or inserted. Each of the electrode plates (20) includes a plurality of through holes (21) horizontally or vertically formed on the entire surface of the electrode plate (20), and a heating pipe directly formed or a separate heating bar (22) so that a heating material passes through. |
