Method for correcting astigmatism using electron-emitting spectromicroscopic imaging

摘要

The method involves imaging reference structures with secondary electrons and with care level photoelectrons by a spectromicroscope, and eliminating astigmatism defects appearing during imaging of the reference structures. A material of the reference structures is chosen such that a contrast between average intensity of the material of the reference structure and average intensity of a material of a sample is calculated by specific equation during core level photoelectron imaging.