| 发明名称 |
Salen-type barium precursors for vapor phase deposition of thin films |
| 摘要 |
<p>Compound of formula (I): [(R1R2R3R4R5R6)Salen)]M(A)x
- M is barium;
- R1, R2, R3, R4, R5, R6 are an organic ligands independently selected in the group consisting of H, C1-C5 linear or branched alkyl;
- A is selected in the group consisting of alcohol, alkylamine, ether;
- 0 ‰¤ x ‰¤ 3</p> |
| 申请公布号 |
EP2708542(A1) |
申请公布日期 |
2014.03.19 |
| 申请号 |
EP20120306118 |
申请日期 |
2012.09.17 |
| 申请人 |
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE |
发明人 |
LACHAUD, CHRISTOPHE;LAHOOTUN, VANINA;ZAUNER, ANDREAS |
| 分类号 |
C07F3/00;C23C16/18;C23C16/40 |
主分类号 |
C07F3/00 |
| 代理机构 |
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代理人 |
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| 地址 |
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