EVAPORATOR AND THIN FILM DEPOSITION SYSTEM COMPRISING THE SAME

摘要

The present invention relates to a carburetor and a thin film deposition system having the same. The carburetor according to an embodiment of the present invention comprises a chamber for forming carburetion space; a heater for heating the chamber; an inlet which is formed in one end of the chamber to inject a liquid raw material into the carburetion space; and an outlet which is formed in the other end of the chamber to discharge the vaporized liquid raw material, wherein the inlet is located in the upper part of the outlet, thereby improving carburetion efficiency of the carburetor.