| 摘要 |
A sheet attaching device(1) for attaching an adhesive sheet (MS) on an adherend (W) includes: a sheet support (6,7) that supports the adhesive sheet (MS) placed opposite to the adherend (W); a decompression unit(3) that keeps the adherend (W) and the adhesive sheet (MS) placed opposite to the adherend (W) in a decompressed atmosphere; an attaching unit (8A, 8B) that brings the adhesive sheet (MS) close to the adherend (W) under the decompressed atmosphere to attach the adhesive sheet (MS) to the adherend (W); and a gap removal unit(4) that removes a gap present between the adherend (W) and the adhesive sheet (MS) after the adherend (W) is attached on the adhesive sheet (MS). |
