| 摘要 |
Disclosed are an ultrasonic transducer and a manufacturing method thereof. The disclosed ultrasonic transducer includes a first electrode layer which is arranged in a conductive substrate and a support stand, a second electrode layer which is formed on the lower side of the conductive substrate and is separated from the first electrode layer, an upper electrode which is formed on the upper side of a membrane and is in contact with the upper side of the first electrode layer, a trench which passes through the upper electrode, the membrane, the support stand, and the conductive substrate, and a pad substrate which is formed on the lower side of the conductive substrate and includes a plurality of bonding pads which are electrically connected to the first electrode layer and the second electrode layer. |
