发明名称 Sensor system
摘要 A sensor system includes a supporting element and a sensor element attached to the supporting element and having a main plane of extension. The supporting element has (i) at least one contact element for electrical contacting of the sensor system and (ii) at least one relief structure for stress decoupling, the at least one relief structure being situated in a plane parallel to the main plane of extension essentially between the at least one contact element and the sensor element.
申请公布号 US8671752(B2) 申请公布日期 2014.03.18
申请号 US20110931011 申请日期 2011.01.21
申请人 HOEFER HOLGER;HANSEN UWE;KNAUSS MICHAEL;ROBERT BOSCH GMBH 发明人 HOEFER HOLGER;HANSEN UWE;KNAUSS MICHAEL
分类号 G01D11/10;G01D11/24;G01P15/08;H01L29/84 主分类号 G01D11/10
代理机构 代理人
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