Encoder, optical module and servo system including plural light receiving elements having respective shapes with respect to a point light source

摘要

An encoder includes a slit array along a first measurement axis, and an optical module capable of relatively moving with respect to the slit array. The optical module comprises a point light source that irradiates the part of the slit array, and a light receiving array comprising a plurality of light receiving elements along a second measurement axis and arranged in positions offset with respect to the point light source. The light receiving elements is receiving light irradiated from the point light source and reflected from the reflection slit. The plurality of light receiving elements comprises respective shapes such that the light receiving element nearer to the point light source comprises a shorter length in a width direction and end parts on an opposite side of the light receiving element with respect to the point light source are arranged side by side in positions along the second measurement axis.