发明名称 Methods of making crystalline tantalum pentoxide
摘要 There is disclosed a method of forming crystalline tantalum pentoxide on a ruthenium-containing material having an oxygen-containing surface wherein the oxygen-containing surface is contacted with a treating composition, such as water, to remove at least some oxygen. Crystalline tantalum pentoxide is formed on at least a portion of the surface having reduced oxygen content.
申请公布号 US8673390(B2) 申请公布日期 2014.03.18
申请号 US201213614854 申请日期 2012.09.13
申请人 BHAT VISHWANATH;KRISHNAN RISHIKESH;GEALY DANIEL F.;MICRON TECHNOLOGY, INC. 发明人 BHAT VISHWANATH;KRISHNAN RISHIKESH;GEALY DANIEL F.
分类号 B05D5/12;B05D3/00;C23C16/00 主分类号 B05D5/12
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