发明名称 |
Methods of making crystalline tantalum pentoxide |
摘要 |
There is disclosed a method of forming crystalline tantalum pentoxide on a ruthenium-containing material having an oxygen-containing surface wherein the oxygen-containing surface is contacted with a treating composition, such as water, to remove at least some oxygen. Crystalline tantalum pentoxide is formed on at least a portion of the surface having reduced oxygen content. |
申请公布号 |
US8673390(B2) |
申请公布日期 |
2014.03.18 |
申请号 |
US201213614854 |
申请日期 |
2012.09.13 |
申请人 |
BHAT VISHWANATH;KRISHNAN RISHIKESH;GEALY DANIEL F.;MICRON TECHNOLOGY, INC. |
发明人 |
BHAT VISHWANATH;KRISHNAN RISHIKESH;GEALY DANIEL F. |
分类号 |
B05D5/12;B05D3/00;C23C16/00 |
主分类号 |
B05D5/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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