发明名称 |
Mass flow controller hysteresis compensation system and method |
摘要 |
A method of characterizing hysteresis as a function of a device output comprising, applying an input signal across a first input signal range to a device, the input signal inducing a device function having a first output with a first output value range dependent upon the first input signal range. The input signal is further applied across a second input signal range to the device, the input signal inducing the device function to have a second output with a second output value range dependent upon (i) the second input signal range and (ii) device hysteresis. A difference between the second input signal range and the first input signal range is then measured across the first and second output value ranges. A method of operating a mass flow controller valve and a mass flow controller are also contemplated. |
申请公布号 |
US8671973(B2) |
申请公布日期 |
2014.03.18 |
申请号 |
US20090356661 |
申请日期 |
2009.01.21 |
申请人 |
SMIRNOV ALEXEI V.;HITACHI METALS, LTD. |
发明人 |
SMIRNOV ALEXEI V. |
分类号 |
F16K31/36;G05B13/02;G05D7/00;G05D11/00 |
主分类号 |
F16K31/36 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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