发明名称 Fabrication method of poly-crystalline Si thin Film and transistor adopting the same
摘要 Example embodiments relate to a poly-crystalline silicon (Si) thin film, a thin film transistor (TFT) formed from a poly-crystalline silicon (Si) thin film and methods of manufacturing the same. The method of manufacturing the poly-crystalline Si thin film includes forming an active layer formed of amorphous Si on a substrate, coating a gold nanorod on the active layer, and irradiating infrared rays onto the gold nanorod to crystallize the active layer.
申请公布号 KR101375834(B1) 申请公布日期 2014.03.18
申请号 KR20070118827 申请日期 2007.11.20
申请人 发明人
分类号 H01L21/20;H01L29/786 主分类号 H01L21/20
代理机构 代理人
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