Strain gauge type force-torque sensor and method for manufacturing the same

摘要

Disclosed is a strain gauge type force-torque sensor and a method for manufacturing the same. More specifically, a first sensor structure having a convex part on a bonding surface thereof and a second sensor structure having a concave part bonded to the convex part of the first sensor structure are formed. The gauge film is formed by installing a strain gauge on a flexible film. The gauge film is compressively interposed between the bonding surface of the first sensor structure having the convex part and a bonding surface of the second sensor structure having the concave part to initially deform the gauge film. The first sensor structure and the second sensor structure are fixed to each other in a state where the gauge film is initially deformed.