| 摘要 |
A take-up vacuum processing apparatus includes a chamber, a roller-shaped first electrode rotatably disposed within the chamber, a gas supply unit including a second electrode, and a third electrode. The first electrode causes the flexible processing target to travel by rotating. The third electrode is connected to an alternating-current source and does not contact the first electrode. An alternating-current voltage of the alternating-current source is applied between the third electrode and the first electrode. The chamber includes a divider plate for separating the chamber into a first room in which the second electrode is arranged and a second room in which the third electrode is arranged. Pressures of the first and second rooms are individually adjusted, such that plasma can be generated between the first electrode and the second electrode, and such that anomalous discharge is not generated between the first electrode and the third electrode. |
