发明名称 |
Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufacturing method |
摘要 |
A gas manifold to direct a gas flow between two plates of an optical component of a lithographic apparatus, the gas manifold having an inlet, a diffuser downstream of the inlet, a flow straightener downstream of the inlet, a contractor downstream of the flow straightener, and an outlet downstream of the contractor. |
申请公布号 |
US8675169(B2) |
申请公布日期 |
2014.03.18 |
申请号 |
US201113273817 |
申请日期 |
2011.10.14 |
申请人 |
VAN BOXTEL FRANK JOHANNES JACOBUS;VAN DAM MARINUS JOHANNES MARIA;JASPER JOHANNES CHRISTIAAN MARIA;VAN DER HAM RONALD;SHULEPOV SERGEI YURIEVICH;PIETERSE GERBEN;BARAGONA MARCO;DEBRAUWER PIETER;VAN DER STEEN ANTONIUS ARNOLDUS HENRICUS;ASML NETHERLANDS B.V. |
发明人 |
VAN BOXTEL FRANK JOHANNES JACOBUS;VAN DAM MARINUS JOHANNES MARIA;JASPER JOHANNES CHRISTIAAN MARIA;VAN DER HAM RONALD;SHULEPOV SERGEI YURIEVICH;PIETERSE GERBEN;BARAGONA MARCO;DEBRAUWER PIETER;VAN DER STEEN ANTONIUS ARNOLDUS HENRICUS |
分类号 |
G03B27/52;G03B27/42 |
主分类号 |
G03B27/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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