Graphite member for beam-line internal member of ion implantation apparatus

摘要

The problem of the present invention is to provide, in high current-low energy type ion implantation apparatuses, a graphite member for a beam line inner member of an ion implantation apparatus, which graphite member can markedly reduce particles incorporated in a wafer surface. This problem can be solved by the graphite member of the present invention, which is a graphite member for a beam line inner member of an ion implantation apparatus, which member having a bulk density of not less than 1.80 Mg/m3 and an electric resistivity of not more than 9.5 muOmega�m. Preferably, the R value obtained by dividing D band intensity at 1370 cm-1 by G band intensity at 1570 cm-1 in the Raman spectrum of a spontaneous fracture surface of the graphite member is not more than 0.20.