| 发明名称 |
DATABASE-DRIVEN CELL-TO-CELL RETICLE INSPECTION |
| 摘要 |
A semiconductor inspection apparatus identifies regions of a reticle or semiconductor wafer appropriate for cell-to-cell inspection by analyzing a semiconductor design database. Appropriate regions can be identified in a region map for use by offline inspection tools. |
| 申请公布号 |
KR20140033371(A) |
申请公布日期 |
2014.03.18 |
| 申请号 |
KR20137031121 |
申请日期 |
2012.04.23 |
| 申请人 |
KLA-TENCOR CORPORATION |
发明人 |
HESS CARL;MILLER JOHN D.;RUI FANG SHI;GUAN CHUN |
| 分类号 |
H01L21/66;G06K9/00;H01L21/027 |
主分类号 |
H01L21/66 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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