发明名称 Charging controlled RRAM device, and methods of making same
摘要 Disclosed herein is a novel charging controlled RRAM (Resistance Random Access Memory), and various methods of making such a charging controlled RRAM device. In one example, a device disclosed herein includes a first word line structure formed above a substrate, wherein the first word line structure includes a gate electrode and a nano-crystal containing layer of insulating material, a second word line structure formed above the substrate, wherein the second word line structure comprises a gate electrode and a nano-crystal containing layer of insulating material, a first implant region formed in the substrate proximate the first word line structure, wherein the first implant region defines a first bit line, and a second implant region formed in the substrate proximate the second word line structure, wherein the second implant region defines a second bit line.
申请公布号 US8673692(B2) 申请公布日期 2014.03.18
申请号 US201213353922 申请日期 2012.01.19
申请人 TAN SHYUE SENG;CHEN TU PEI;GLOBALFOUNDRIES SINGAPORE PTE LTD.;NANYANG TECHNOLOGICAL UNIVERSITY 发明人 TAN SHYUE SENG;CHEN TU PEI
分类号 H01L21/00;H01L21/82;H01L21/84 主分类号 H01L21/00
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