发明名称 Memory device with charge storage layers at the sidewalls of the gate and method for fabricating the same
摘要 A memory device is described, including a gate over a substrate, a gate dielectric between the gate and the substrate, and two charge storage layers. The width of the gate is greater than that of the gate dielectric, so that two gaps are present at both sides of the gate dielectric and between the gate and the substrate. Each charge storage layer includes a body portion in one of the gaps, a first extension portion connected with the body portion and protruding out of the corresponding sidewall of the gate, and a second extension portion connected to the first extension portion and extending along the sidewall of the gate, wherein the edge of the first extension portion protrudes from the sidewall of the second extension portion.
申请公布号 US8674424(B2) 申请公布日期 2014.03.18
申请号 US201113304378 申请日期 2011.11.24
申请人 YAN SHIH-GUEI;TSAI WEN-JER;CHENG CHIH-CHIEH;MACRONIX INTERNATIONAL CO., LTD. 发明人 YAN SHIH-GUEI;TSAI WEN-JER;CHENG CHIH-CHIEH
分类号 H01L29/76;H01L21/8238 主分类号 H01L29/76
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