发明名称 Magnifying observation apparatus
摘要 Work to obtain an optical and an electron microscope images at an identical display size is facilitated. A magnifying observation apparatus includes: an electron beam imaging device that obtains an electron microscope image in a chamber; an optical imaging device that obtains an optical image in the chamber; a moving device that moves the both devices such that an optical axis direction of one of the both devices is aligned with an optical axis direction of the other device; a display section that displays the electron microscope and the optical images; and a magnifying power conversion section that recognizes a magnifying power of an image obtained by one of the imaging devices and converts the magnifying power, which is used to obtain an image having a display size substantially identical to that of the image, by the other device into a magnifying power on a basis of the other device.
申请公布号 US8674301(B2) 申请公布日期 2014.03.18
申请号 US201113152353 申请日期 2011.06.03
申请人 TAKAGI SHIGENORI;KEYENCE CORPORATION 发明人 TAKAGI SHIGENORI
分类号 G01N23/00 主分类号 G01N23/00
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