发明名称 Methods of forming fins and isolation regions on a FinFET semiconductor device
摘要 One illustrative device disclosed herein includes a substantially un-doped layer of a semiconductor material positioned above a semiconducting substrate, a device isolation structure, at least a portion of which is positioned in a trench that extends through the substantially un-doped semiconductor material and into the substrate, a plurality of outer fins and at least one inner fin defined in the substantially un-doped layer of semiconductor material, wherein the at least one inner fin is positioned laterally between the plurality of outer fins and wherein a width of a bottom of each of the plurality of outer fins is greater than a width of a bottom of the inner fin, and a gate electrode positioned around at least a portion of the plurality of outer fins and the inner fin.
申请公布号 US8674413(B1) 申请公布日期 2014.03.18
申请号 US201213670605 申请日期 2012.11.07
申请人 GLOBALFOUNDRIES INC. 发明人 CHI MIN-HWA
分类号 H01L29/76 主分类号 H01L29/76
代理机构 代理人
主权项
地址