发明名称 Laser crystallization system and method of manufacturing display apparatus using the same
摘要 A laser crystallization system and a method of manufacturing a display apparatus using the laser crystallization system are disclosed. In one embodiment, the system includes i) a mother substrate in which first, second, and third display regions and ii) a stage for supporting the mother substrate and moving in first and second directions perpendicular to each other. The embodiment also includes i) a first laser irradiation unit for irradiating a first laser beam having a width greater than or identical to a width of a side of one of the first, second, and third display regions in the first direction and ii) a second laser irradiation unit spaced apart from the first laser irradiation unit and irradiating a second laser beam having a width greater than or identical to the width of the one side in the first direction.
申请公布号 US8673751(B2) 申请公布日期 2014.03.18
申请号 US201113272114 申请日期 2011.10.12
申请人 OH JAE-HWAN;CHOI JAE-BEOM;LEE WON-KYU;CHANG YOUNG-JIN;JIN SEONG-HYUN;SAMSUNG DISPLAY CO., LTD. 发明人 OH JAE-HWAN;CHOI JAE-BEOM;LEE WON-KYU;CHANG YOUNG-JIN;JIN SEONG-HYUN
分类号 H01L21/20 主分类号 H01L21/20
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