发明名称 |
Methods and apparatus for transporting substrate carriers |
摘要 |
A conveyor apparatus adapted to transport and article is provided. The conveyor apparatus has a belt section including a plurality of slots and a plurality of T-shaped stiffeners extending in the slots. Respective belt sections may be spliced together using a plurality of T-shaped stiffeners extending through slots in diagonally-formed ends of each belt section. Methods of the invention are described as are numerous other aspects. |
申请公布号 |
US8672121(B2) |
申请公布日期 |
2014.03.18 |
申请号 |
US20080254839 |
申请日期 |
2008.10.21 |
申请人 |
SHAH VINAY K.;HUDGENS JEFFREY C.;APPLIED MATERIALS, INC. |
发明人 |
SHAH VINAY K.;HUDGENS JEFFREY C. |
分类号 |
B65G15/44;B65G15/22;B65G15/60 |
主分类号 |
B65G15/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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