发明名称 Methods and apparatus for transporting substrate carriers
摘要 A conveyor apparatus adapted to transport and article is provided. The conveyor apparatus has a belt section including a plurality of slots and a plurality of T-shaped stiffeners extending in the slots. Respective belt sections may be spliced together using a plurality of T-shaped stiffeners extending through slots in diagonally-formed ends of each belt section. Methods of the invention are described as are numerous other aspects.
申请公布号 US8672121(B2) 申请公布日期 2014.03.18
申请号 US20080254839 申请日期 2008.10.21
申请人 SHAH VINAY K.;HUDGENS JEFFREY C.;APPLIED MATERIALS, INC. 发明人 SHAH VINAY K.;HUDGENS JEFFREY C.
分类号 B65G15/44;B65G15/22;B65G15/60 主分类号 B65G15/44
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