High frequency power supply device

摘要

A high frequency power supply device includes a high frequency power generation unit configured to output a high frequency power to be supplied to a load and a control unit configured to detect a mean value of the high frequency power to control the high frequency power generation unit. A power change period detection unit detects a period of a level change of the high frequency power that is detected at an output side of the high frequency power generation unit due to a periodic change of a level of a high frequency power that is given to a load from another high frequency power supply device as a power change period TZ. A control period setting unit sets a control period TC to an appropriate value in accordance with the power change period TZ detected by the power change period detection unit.