| 发明名称 |
Process and apparatuses for preparing ultrapure silicon |
| 摘要 |
A process for preparing high-purity silicon by thermal decomposition of a silicon compound includes decomposing the silicon compound by mixing with a carrier gas at a temperature at which the silicon compound is thermally decomposed. |
| 申请公布号 |
US8673255(B2) |
申请公布日期 |
2014.03.18 |
| 申请号 |
US200913131158 |
申请日期 |
2009.11.27 |
| 申请人 |
PETRIK ADOLF;SCHMID CHRISTIAN;HAHN JOCHEM;SCHMID SILICON TECHNOLOGY GMBH |
发明人 |
PETRIK ADOLF;SCHMID CHRISTIAN;HAHN JOCHEM |
| 分类号 |
C01B33/02 |
主分类号 |
C01B33/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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