发明名称 Field effect transistor having germanium nanorod and method of manufacturing the same
摘要 <p>A field effect transistor having at least one Ge nanorod and a method of manufacturing the field effect transistor are provided. The field effect transistor may include a gate oxide layer formed on a silicon substrate, at least one nanorod embedded in the gate oxide layer having both ends thereof exposed, a source electrode and a drain electrode connected to opposite sides of the at least one Ge nanorod, and a gate electrode formed on the gate oxide layer between the source electrode and the drain electrode.</p>
申请公布号 KR101375833(B1) 申请公布日期 2014.03.18
申请号 KR20070043025 申请日期 2007.05.03
申请人 发明人
分类号 H01L29/786 主分类号 H01L29/786
代理机构 代理人
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