发明名称 3D integrated circuits structure
摘要 A structure of connecting at least two integrated circuits in a 3D arrangement by a metal-filled through silicon via which simultaneously connects a connection pad in a first integrated circuit and a connection pad in a second integrated circuit.
申请公布号 US8674515(B2) 申请公布日期 2014.03.18
申请号 US201213364002 申请日期 2012.02.01
申请人 FAROOQ MUKTA G.;IYER SUBRAMANIAN S.;KOESTER STEVEN J.;ZHU HUILONG;INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 FAROOQ MUKTA G.;IYER SUBRAMANIAN S.;KOESTER STEVEN J.;ZHU HUILONG
分类号 H01L23/538 主分类号 H01L23/538
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