NOVEL POLYSILOXANE COMPOUND AND THIN FILM USING THE SAME, AND METHOD FOR PRODUCING MICROFINE STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a material that can be heated at above a specific temperature to cause phase separation and thereby can form microfine patterns of about 10 nm or less.SOLUTION: A polysiloxane compound is represented in the formula (1). In the formula (1), R, each independently, is aryl in which one or more hydrogen may be substituted to other substituent, or arylalkyl in which one or more hydrogen may be substituted to other substituent, Ris alkyl or aryl of carbon number 1 to 10, and Y is substituent.