发明名称 CRYSTAL WAFER AND CRYSTAL PIECE MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To aggregate a plurality of crystal pieces densely on a crystal wafer, thereby increasing the number of crystal pieces obtained.SOLUTION: Provided is an AT-cut crystal wafer in thickness of T having a plurality of crystal pieces formed thereon, the crystal wafer being characterized in that a side face crossing a Z' axis of a penetration part formed on the crystal wafer by wet etching is constituted by a face orthogonal to an R face and by an m face, that a boundary between a face orthogonal to the R face and the m face on one side of the penetration part is juxtaposed with a boundary between the face orthogonal to the R face and the m face on the adjacent other side vertically in the thickness direction, and that the face orthogonal to the R face on the other side is located on the m face on the one side, and the m face on the other side is located on the face orthogonal to the R face on the one side.
申请公布号 JP2014049948(A) 申请公布日期 2014.03.17
申请号 JP20120191672 申请日期 2012.08.31
申请人 KYOCERA CRYSTAL DEVICE CORP 发明人 SASAOKA KOHEI;IWATA KOICHI;SHIRASAWA HITOSHI;KASAHARA KEI
分类号 H03H9/19;H01L41/18;H01L41/39;H03H3/02 主分类号 H03H9/19
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