发明名称 STRIPPER COMPOSITION FOR THICK NEGATIVE PHOTORESIST
摘要 The present invention relates to a stripper composition for photoresist removal. The composite according to the present invention comprises 1-5 wt% of a compound represented by chemical formula (1), 70-95 wt% of a polar organic solvent, 0.1-5 wt% of a hydroxide-based compound and a rest amount of water. The stripper composition according to the present invention is able to effectively complete a stripping process within a short time by including the proper amount of the compound represented by chemical formula (1) without an anticorrosive agent and is able to minimize composition variation in a stripping process performed at relatively high process temperatures as compared to a different process. The stripper composition is able to prevent post-processing defect such as evaporation defect due to the adsorption of non-aqueous anticorrosive agents by excluding anticorrosive agents while preventing electrode damage.
申请公布号 KR101375100(B1) 申请公布日期 2014.03.17
申请号 KR20120096430 申请日期 2012.08.31
申请人 发明人
分类号 G03F7/039;G03F7/34 主分类号 G03F7/039
代理机构 代理人
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