发明名称 SPATIAL LIGHT MODULATOR, AND OPTICAL INTEGRATED CIRCUIT
摘要 PROBLEM TO BE SOLVED: To ensure an amount of light to be modulated, by suppressing scattering of light impinging on or emitted from an end part of an optical element due to a substrate which supports wiring in a wiring area adjacent to the end part.SOLUTION: A spatial light modulator includes: an optical element which includes end parts provided on an incidence side and an emission side and a waveguide provided between the end parts and couples external propagating light and the waveguide at the end parts to guide light impinging on the end part on the incidence side end part as the external propagating light to the waveguide and emit the light as the external propagating light from the end part on the emission side; a substrate having the optical element attached to a surface thereof; an electrode facing the waveguide; and wiring provided in a wiring area adjacent to a wiring adjacent end part being one of the end parts on the incidence side and the emission side, on the surface of the substrate and is electrically connected to the electrode. The waveguide has a diffraction grating formed in a part thereof to which an electric signal is applied, and the optical element couples the external propagating light which propagates in such an inclination direction inclined to the surface of the substrate that a distance from the wiring adjacent end part is increased with an increase of a distance from the wiring area, to the waveguide at the wiring adjacent end part.
申请公布号 JP2014048361(A) 申请公布日期 2014.03.17
申请号 JP20120189544 申请日期 2012.08.30
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 OKAZAKI MASAHIDE;MIZUNO HIROBUMI
分类号 G02F1/03 主分类号 G02F1/03
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