发明名称 STICKY ADHESIVE FILM AND PRODUCTION METHOD OF SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a sticky adhesive film in which suppression of adhesion transfer of a sticky adhesion layer and securement of peel strength with a substrate film can be combined by a simple configuration; and a production method of a semiconductor device using the same.SOLUTION: In a sticky adhesive film 1, tack strength FA of a one side face 13A that faces to a side of a substrate film 11 and tack strength FB of other side face 13B that faces to an opposite side of a side of the substrate film 11 satisfy FA>FB and 10 gf≤FB≤800 gf. Thereby, while peel strength of a sticky adhesion layer 13 and the substrate film 11 is secured, suppression of generation of adhesion transfer of the sticky adhesion layer 13 to a dicing frame 22 can be performed. Moreover, a different component is not used to the sticky adhesive film 1, thereby configuration does not become complicate, and cost reduction is achieved.
申请公布号 JP2014047288(A) 申请公布日期 2014.03.17
申请号 JP20120191667 申请日期 2012.08.31
申请人 HITACHI CHEMICAL CO LTD 发明人 MASUNO MICHIO;MURAHASHI TOMOKO;KODAMA MEGUMI;IWANAGA YUKIHIRO;SOBUE SHOGO
分类号 C09J7/02;C09J201/00;H01L21/301 主分类号 C09J7/02
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