| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow rate control device 100 which is stably and accurately operated even in a low flow rate region without complicating a configuration.SOLUTION: The flow rate control device includes: a flow rate adjustment valve 1 having such signal value-flow rate characteristics that the larger an increment of a flow rate relative to a unit increment of a driving signal value is in a low flow rate region the larger the driving signal value is; a fluid resistance element 2 having such flow rate-pressure characteristics that the smaller an increment of pressure acting on the fluid resistance element 2 relative to the unit increment of the flow rate is in the low flow rate region the higher the flow rate is; a flow rate calculation unit 42 which subjects a measurement pressure of pressure measuring means for measuring the pressure, to prescribed pressure-flow rate conversion operation to calculate a measurement flow rate; a set pressure calculation unit 43 which subjects a set flow rate to inverse operation of the pressure-flow rate conversion operation to calculate a set pressure; and a driving signal output unit 44 which calculates the driving signal value on the basis of a deviation between the set pressure and the measurement pressure and outputs the calculated driving signal value to the flow rate adjustment valve 1. |
