| 摘要 |
PROBLEM TO BE SOLVED: To analyze a position of an atomic row with good positional accuracy in a short time on the basis of an observation image.SOLUTION: An analysis method of a crystalline structure includes the steps of: acquiring a diffraction pattern by subjecting an observation image of a crystal to the Fourier transformation; extracting, from a plurality of diffraction spots included in the diffraction pattern, diffraction spots corresponding to two different atomic surfaces and subjecting the diffraction spots to the inverse Fourier transformation to acquire two reverse conversion images each including a light-dark fringe pattern composed of bright parts and dark parts; and determining a position where the bright parts of the two reverse conversion images intersect with each other to determine a position of an atomic row. |
