发明名称 MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To attain high reliability at a joint using a solder, by a simple manufacturing method.SOLUTION: At first, the temperature is raised up to a preheat temperature (region I: temperature rise step). Subsequently, the preheat temperature is held for 50-120 seconds (region II: preheat step). The preheat temperature is lower than the setting temperature (180°C) of epoxy resin by 20-40°C, and is about 150°C in this case. Thereafter, a peak temperature is set in a range of 260-280°C, e.g., 250°C, higher than the melting point (220°C) of metal particles (solder) 52, and it is held for 30-50 seconds (region III: melting step). In this manufacturing method, flux surrounds the outer periphery of a semiconductor chip in uncured state, in the preheat step. Subsequently, in the melting step, the metal particles in congestion state are melted and fused.
申请公布号 JP2014049647(A) 申请公布日期 2014.03.17
申请号 JP20120192277 申请日期 2012.08.31
申请人 SANKEN ELECTRIC CO LTD 发明人 SATO KEI
分类号 H01L21/52 主分类号 H01L21/52
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