| 摘要 |
PROBLEM TO BE SOLVED: To provide a levitation device capable of holding a workpiece in a desired position or conveying the workpiece to the desired position, by levitating the thin plate-like workpiece on a pad by a simple configuration.SOLUTION: A levitation device of the present invention levitates a thin plate-like workpiece W on a pad 2. A large number of pores, which communicate with a pressurized air source and which emit a jet of pressurized air, and at least one groove 6 are provided on the surface of the pad, and a vacuum hole 10 which communicates with suction means is formed at one end of the groove. |
